 技術摘要： |
一種微透鏡製造方法以及以單一光罩圖形搭配光蝕刻微影技術，係提供基板並於基板表面形成複數個微型洞結構(Micro-holes)結構，再於各微型洞結構中置入透鏡材料，接著加熱各透鏡材料進而使其熱融(Reflow)而成複數個透鏡單元。該微型洞結構係用以界定該透競材料熱融成透鏡單元之邊界(Boundary Of Lens)，進而避免傳統微透鏡製造方法中，因加熱過度而使兩相鄰的透鏡單元熱融接合之問題。該以單一光罩圖形搭配光蝕刻微影技術則係利用負光阻與正光阻分別建立微型洞結構與透鏡材料，進而將本發明有效率應用於現代化製程之微透鏡製造方法。
A method for fabricating micro-lenses and a method for fabricating micro-lenses by photolithography are provided. The method includes forming a plurality of micro-cavities in a substrate, filling lens material into each of the micro-cavities, and heating the lens material, thereby reflowing the lens material so as to form a plurality of micro-lenses in the substrate. The micro-cavities define a boundary of each of the micro-lenses formed by reflowing the lens material, thereby preventing adjacent micro-lenses from fusing together by reflowing when overheated. The process uses negative photoresist and positive photoresist as micro-cavities and lens material respectively, thereby streamlining the fabrication method and its steps.
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聯繫方式 |
| 聯絡人：
研發處產學合作總中心 |
電話：
(02)3366-9949 |
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| 地 址：
10617臺北市大安區羅斯福路四段1號 禮賢樓六樓608室 |
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