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 薄膜材料之特性檢測方法
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刊登日期：2014/05/21 |
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| ‧ 專利名稱 |
薄膜材料之特性檢測方法 |
| ‧ 專利證書號 |
9494410
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| ‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
美國 (2013/12/05)
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| ‧ 發明人/PI |
黃升龍,何端書,蔡建中,許光裕,
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| ‧ 單位 |
光電工程學研究所
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| ‧ 簡歷/Experience |
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| 技術摘要 / Our Technology： |
A method for measuring characteristics of a sample is provided. The method includes the following steps: obtaining an interference spectrum of the sample; transforming the interference spectrum into a temporal interference signal via a Fourier transform, in which the temporal interference signal includes a plurality of coherence wave packets; separating the wave packets; transforming the wave packets into a plurality of interface interference signals via an inverse Fourier transform; and fitting a plurality of factors of the interface interference signals into a model for obtaining the refractive indexes, the extinction coefficients, and a thickness of the sample.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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