薄膜材料之特性檢測方法
刊登日期:2014/05/21
  ‧ 專利名稱 薄膜材料之特性檢測方法
  ‧ 專利證書號 9494410
  ‧ 專利權人 國立臺灣大學
  ‧ 專利國家
    (申請日)
美國 (2013/12/05)
 
  ‧ 發明人/PI 黃升龍,何端書,蔡建中,許光裕,
  ‧ 單位 光電工程學研究所
  ‧ 簡歷/Experience
技術摘要 / Our Technology:
A method for measuring characteristics of a sample is provided. The method includes the following steps: obtaining an interference spectrum of the sample; transforming the interference spectrum into a temporal interference signal via a Fourier transform, in which the temporal interference signal includes a plurality of coherence wave packets; separating the wave packets; transforming the wave packets into a plurality of interface interference signals via an inverse Fourier transform; and fitting a plurality of factors of the interface interference signals into a model for obtaining the refractive indexes, the extinction coefficients, and a thickness of the sample.



專利簡述 / Intellectual Properties:




 

聯繫方式 / Contact:
臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU
Email:ordiac@ntu.edu.tw 電話/Tel:02-3366-9945