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微機電接觸表面檢測方法(Method for Characterizing MEMS Contact Surface)
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刊登日期:2022/01/06 |
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‧ 專利名稱 |
微機電接觸表面檢測方法 |
‧ 專利證書號 |
US11,634,319B2
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‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
美國 (2020/07/02) 美國 (2020/12/07)
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‧ 發明人/PI |
李尉彰,蔡淳樸,王宣緯,
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‧ 單位 |
應用力學研究所
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‧ 簡歷/Experience |
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技術摘要 / Our Technology: |
A surface monitoring device is for monitoring a contact surface of a detected object. The surface monitoring device and the detected object are disposed on a substrate. The surface monitoring device includes a resonant mechanical part, having a contact tip adjacent to the contact surface by a preset gap in a static state. A driving circuit, applying an AC input signal to drive the resonant mechanical part to cause the contact tip to vibrate with respect to the contact surface at a plurality of sampling frequencies. The contact tip substantially hits the contact surface in a tapping bandwidth within the sampling frequencies. An analysis circuit to analyze a ratio of an output voltage to an input voltage of the input signal and determine the tapping bandwidth, wherein the ratio in the tapping bandwidth is jumping to a flatten phase.
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專利簡述 / Intellectual Properties: |
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聯繫方式 / Contact: |
臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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Email:ordiac@ntu.edu.tw |
電話/Tel:02-3366-9945 |
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