微機電接觸表面檢測方法(Method for Characterizing MEMS Contact Surface)
刊登日期:2022/01/06
  ‧ 專利名稱 微機電接觸表面檢測方法
  ‧ 專利證書號 US11,634,319B2
  ‧ 專利權人 國立臺灣大學
  ‧ 專利國家
    (申請日)
美國 (2020/07/02)
美國 (2020/12/07)
 
  ‧ 發明人/PI 李尉彰,蔡淳樸,王宣緯,
  ‧ 單位 應用力學研究所
  ‧ 簡歷/Experience
技術摘要 / Our Technology:
A surface monitoring device is for monitoring a contact surface of a detected object. The surface monitoring device and the detected object are disposed on a substrate. The surface monitoring device includes a resonant mechanical part, having a contact tip adjacent to the contact surface by a preset gap in a static state. A driving circuit, applying an AC input signal to drive the resonant mechanical part to cause the contact tip to vibrate with respect to the contact surface at a plurality of sampling frequencies. The contact tip substantially hits the contact surface in a tapping bandwidth within the sampling frequencies. An analysis circuit to analyze a ratio of an output voltage to an input voltage of the input signal and determine the tapping bandwidth, wherein the ratio in the tapping bandwidth is jumping to a flatten phase.



專利簡述 / Intellectual Properties:




 

聯繫方式 / Contact:
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