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Method for Drilling Micro-hole and Structure Thereof
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刊登日期:2014/05/21 |
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‧ 專利名稱 |
微尺度孔洞結構的製作方法 |
‧ 公開號 |
US 2012/0074108 A1
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‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
美國 (2011/12/06)
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‧ 發明人/PI |
胡文聰,鍾德憲,陳昌佑,劉冠廷,熊樂昌,
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‧ 單位 |
應用力學研究所
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‧ 簡歷/Experience |
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技術摘要 / Our Technology: |
Disclosed is a micro-hole structure and a method for forming the micro-hole. A working energy source is projected onto a predetermined drilling site on a first surface of a substrate for a given period of time so as to melt a portion of the substrate to form a working energy entering section until the working energy source penetrates through a second surface of the substrate to form a micro-hole. A melt formed by melting a portion of the substrate in the micro-hole next to the second surface is allowed to reflow in a direction opposite to the projection of the working energy source to thereby form a reflow section in the substrate. Further, a two or more stages emission of laser pulses is used to form the micro-hole to control the bore diameter of the micro-hole.
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專利簡述 / Intellectual Properties: |
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聯繫方式 / Contact: |
臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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Email:ordiac@ntu.edu.tw |
電話/Tel:02-3366-9945 |
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