 技術摘要 / Our Technology： |
本發明揭露一種維持材料表面平整度的製作方法，首先提供一基板；接著，形成一目標材料層於基板上，目標材料係為一可結晶性材料；然後，形成一保護層於目標材料層上；接著，進行一退火處理，藉由保護層的張力與對目標材料層附著的壓力維持目標材料層的表面平整度；最後，移除保護層。
A method for maintaining a smooth surface of crystallizable material is disclosed. First, a substrate is provided. A target material layer is then formed on the substrate, with the target material being a crystallizable material. A protecting layer is subsequently formed on the target material layer. Next, an annealing treatment is implemented, with the surface of the target material layer, facing the protecting layer, being maintained in its original smooth state by the pressure and/or adhesion of the protecting layer. Finally, the protecting layer is removed to leave an open and smooth surface of the processed crystallizable material.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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專利行銷平台