技術摘要 / Our Technology: |
本發明提供一種波浪狀光罩的製作方法,其步驟包括:首先,備置一軟性透明基板,接著,對該軟性透明基板持續施予一外力,使該軟性透明基板產生形變,之後,形成一可透光薄膜層於該軟性透明基板的上表面,最後除去施予該軟性透明基板的該外力,使該軟性透明基板的上表面呈一週期性波浪狀。
wave-shaped mask for fabricating a nano-scale structure is disclosed. The wave-shaped mask comprises an elastomeric transparent substrate having an upper surface and a lower surface, and a light-penetrable thin film layer disposed on the upper surface of the elastomeric transparent substrate. The upper surface of the elastomeric transparent substrate and the light-penetrable thin film layer are in a periodic wave shape, and the lower surface of the elastomeric transparent substrate is in a plate shape.
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專利簡述 / Intellectual Properties: |
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聯繫方式 / Contact: |
臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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Email:ordiac@ntu.edu.tw |
電話/Tel:02-3366-9945 |
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