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具垂直磁異向性之單層鐵磁性合金薄膜 |
刊登日期:2014/05/21 |
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‧ 專利名稱 |
具垂直磁異向性之單層鐵磁性合金薄膜 |
‧ 專利證書號 |
I389107
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‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
中華民國 (2009/11/03) 美國 (2010/03/23) 歐洲 (2010/05/21)
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‧ 發明人 |
陳勝吉, 沈智隆, 林哲平, 孫達皇, 郭博成, 張慶瑞, |
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技術摘要: |
本發明係提供一種具垂直磁異向性之單層鐵磁性合金薄膜,其包含一基板;及一鐵磁性層,形成於該基板上,其中該鐵磁性層經由一快速熱退火(rapid thermal annealing,RTA)處理後之平均晶粒尺寸趨近於該鐵磁性層厚度,藉以獲得一具有垂直膜面磁異向性之單層鐵磁性合金薄膜。
The present invention discloses a single-layered recording film with perpendicular magnetic anisotropy. The single-layered recording film includes a substrate and a ferromagnetic layer. The ferromagnetic layer is formed on the substrate and annealed by a rapid thermal annealing process. After annealing, the average grain size of the single-layered recording film is close to the film thickness of ferromagnetic layer, which is beneficial to achieve a single-layered recording film with perpendicular magnetic anisotropy.
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