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共路徑干涉單點掃瞄鏡頭模組
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刊登日期:2014/11/13 |
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‧ 專利名稱 |
共路徑干涉單點掃瞄鏡頭模組 |
‧ 專利證書號 |
I490542 9441945
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‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
中華民國 (2013/05/07) 美國 (2013/09/26)
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‧ 發明人/PI |
黃升龍,蔡建中,
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‧ 單位 |
光電工程學研究所
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‧ 簡歷/Experience |
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技術摘要 / Our Technology: |
A scan lens and an interferometric measuring device using the scan lens are disclosed. The scan lens includes a lens set, a beam splitter, and a reflector disposed between the lens set and the beam splitter. During application the applied light beam passes through the lens set of the interferometric measuring device to fall upon the beam splitter where the light beam that passes through the beam splitter is defined as a first light beam and the light beam that is reflected by the beam splitter is defined as a second light beam. The first light beam is projected onto the test object. The second light beam is projected onto the reflector. The second light beam reflected by the reflector and the first light beam reflected or scattered by the test object will interfere with each other to form interference patterns for measuring the test object.
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專利簡述 / Intellectual Properties: |
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聯繫方式 / Contact: |
臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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Email:ordiac@ntu.edu.tw |
電話/Tel:02-3366-9945 |
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