 技術摘要 / Our Technology： |
一種太陽能電池的製造方法,包括以下步驟。首先,提供第一導電型的矽晶片,其中矽晶片具有彼此相對的第一表面與第二表面,且第一表面上具有多個奈米柱。之後,進行摻雜製程,使奈米柱以及位於奈米柱下方的部分矽晶片的導電型態改變為第二導電型。然後,於第二表面上形成第一電極,並對第一電極進行第一退火製程。接著,於第一表面上的部分區域形成第二電極。其後,進行原子層沈積製程,於第一表面與奈米柱的表面上形成表面鈍化層。
A method of manufacturing a solar cell includes following steps. A first-conductive-type silicon wafer is provided. The silicon wafer has a first (front) surface and a second (back) surface facing each other, and a plurality of nanorods are located on the first surface. A doping process is performed, so that the conductive type of the nanorods and the conductive type of one portion of the silicon wafer located below the nanorods are changed to a second conductive type. A first electrode is formed on the second surface, and a first annealing process is performed on the first electrode. A second electrode is formed on a partial region of the first surface. An atomic layer deposition process is performed to form a passivation layer on the first surface and surfaces of the nanorods.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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專利行銷平台