 技術摘要 / Our Technology： |
一種慣性感測裝置，包括基板、配置於基板上方且具有開口的第一質量塊、配置於開口內的第二質量塊、連接於基板及第一質量塊之間的第一彈性件、連接於第一質量塊及第二質量塊之間的第二彈性件、配置於基板與第一質量塊之間的電壓驅動單元、配置於基板與第一質量塊之間的加速度感測單元及配置於第一與第二質量塊之間的慣性感測結構。加速度感測單元適於感測第一質量塊在第一方向的加速度。慣性感測結構適於感測第二質量塊在垂直於第一方向的第二方向的加速度，並適於感測第二質量塊的角速度。
An inertia sensing device includes a substrate, a first mass disposed over the substrate and has an opening, a second mass disposed in the opening, first elastic elements connected between the substrate and the first mass, second elastic elements connected between the first and second masses, a voltage driving element disposed between the substrate and the first mass, a acceleration sensing element disposed between the substrate and the first mass and an inertia sensing structure disposed between the first and second masses. The acceleration sensing element is suitable for sensing an acceleration of the first mass in a first direction. The inertia sensing structure is suitable for sensing an acceleration of the second mass in a second direction perpendicular to the first direction, and suitable for sensing an angular velocity of the second mass.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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專利行銷平台