具空間解析度和靈敏度改善的差動式近場磁場探針 刊登日期:2015/06/11
  ‧ 專利名稱 具空間解析度和靈敏度改善的差動式近場磁場探針
  ‧ 專利證書號 I509272
9606198
  ‧ 專利權人 臺大
  ‧ 專利國家
    (申請日)
中華民國 (2013/12/09)
美國 (2014/05/09)
  ‧ 發明人 盧信嘉, 周晏田,
 
技術摘要:
A magnetic field probe, a magnetic field measurement system, and a magnetic field measurement method are provided. The magnetic field probe includes a probe head. The probe head includes a first and second inner metal layer. The first inner metal layer includes a first sensing part and a first connecting part coupled thereto. The first sensing part is configured for detecting a magnetic field signal of a device under test to form a first magnetic field distribution signal. The second inner metal layer includes a second sensing part and a second connecting part coupled thereto. The second sensing part is configured for detecting the magnetic field signal of the device under test to form a second magnetic field distribution signal. A distance between the first sensing part and the device under test is smaller than that between the second sensing part and the device under test.



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