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 THRUST RIPPLE MAPPING SYSTEM IN A PRECISION STAGE AND METHOD THEREOF(量測平台之漣波驅動系統及其方法)
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刊登日期：2014/08/28 |
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| ‧ 專利名稱 |
量測平台之漣波驅動系統及其方法 |
| ‧ 專利證書號 |
US 9,331,624 B2
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| ‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
美國 (2013/02/25)
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| ‧ 發明人/PI |
顏家鈺,郭富存,Craig Western,
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| ‧ 單位 |
機械工程學系
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| ‧ 簡歷/Experience |
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| 技術摘要 / Our Technology： |
The present invention proposes a thrust ripple mapping system in a precision stage with the thrust ripple mapping system comprising a moving stage, a load cell, a plurality of motors and a processing component. The load cell is coupled to the moving stage. The motors are employed in moving the load cell and the moving stage. The processing component takes a thrust force measurement at each of a plurality of moving increments of the load cell.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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