 技術摘要 / Our Technology： |
本發明係有關於一種透明導電薄膜及其製法，該透明導電薄膜包括複數層氧化物原子層，其包含複數種氧化物原子層，其中單一層的複數種氧化物原子層包含一種以上的氧化物均勻混合。該製法包括經由不同來源，分別通入一種以上的氧化物前驅物至原子層沈積設備中，其中該些氧化物前驅物同時且連續地進入原子層沈積設備中，均勻混合吸附於基底之上，接著通入氧化劑，與該些氧化物前驅物反應，形成單一層之複數種氧化物原子層，以及重複上述步驟，形成複數層之複數種氧化物原子層。
A transparent conductive film and a fabrication method thereof are provided. The transparent conductive film includes a plurality of oxide atomic layers, containing a plurality of multi-oxide atomic layers, wherein a single multi-oxide atomic layer has more than one kind of uniformly mixed oxide. The method includes providing more than one kind of oxide precursor which is individually introduced into atomic layer deposition equipment through different sources, wherein the oxide precursors are consecutively introduced into the atomic layer deposition equipment, so that the oxide precursors are simultaneously present in the atomic layer deposition equipment, forming a uniform mixture for settling onto the substrate. Then, an oxidant is provided to react with the oxide precursors to form a single multi-oxide atomic layer. The above mentioned steps are repeated to form a plurality of multi-oxide atomic layers.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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專利行銷平台