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 電容式壓力感測器裝置及其製造方法
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刊登日期：2014/05/21 |
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| ‧ 專利名稱 |
電容式壓力感測器裝置及其製造方法 |
| ‧ 專利證書號 |
I383130
US 8,250,926
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| ‧ 專利權人 |
國立臺灣大學 |
‧ 專利國家
(申請日) |
中華民國 (2009/07/13)
美國 (2010/01/13)
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| ‧ 發明人/PI |
楊燿州,鄭茗元,黃信華,
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| ‧ 單位 |
機械工程學系
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| ‧ 簡歷/Experience |
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| 技術摘要 / Our Technology： |
本發明揭露一種電容式壓力感測器裝置及其製造方法。其中電容式壓力感測器裝置包括覆蓋體、複數個第一金屬電極、基底以及複數個第二金屬電極。覆蓋體具有上層與複數個側壁。複數個第一金屬電極設置於覆蓋體的上層的內側。基底連接覆蓋體的複數個側壁，形成一容置空間。複數個第二金屬電極設置於基底，複數個第一金屬電極與該複數個第二金屬電極位於容置空間。覆蓋體、複數個第一金屬電極以及基底的材質為高分子可撓性材料。
The invention relates to a capacitive pressure sensor and a method for fabricating thereof. The capacitive pressure sensor comprises a cover, a plurality of first electrode, a substrate and a plurality of second electrode. The cover owns an upper wall and a plurality of side walls. The plurality of first electrode is disposed on the inside of the upper wall of the cover. The side walls of the cover are connected to the substrate to form a space. The plurality of second electrode is disposed on the substrate. The plurality of first electrode and the plurality of second electrode are both in the space. In the invention, the material for cover, the plurality of first electrodes and the substrate are all flexible polymeric material.
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| 專利簡述 / Intellectual Properties： |
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聯繫方式 / Contact： |
| 臺大產學合作總中心 / Center of Industry-Academia Collaboration, NTU |
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| Email：ordiac@ntu.edu.tw |
電話/Tel：02-3366-9945 |
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